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Journal Articles Review of Scientific Instruments Year : 2013

Quadrature phase interferometer for high resolution force spectroscopy


In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the cantilever tip and a reference beam reflecting on the static base of the sensor. A design with very low environmental susceptibility and another allowing calibrated measurements on a wide spectral range are described. Both enable a very high resolution (down to 2.5E-15 m/rtHz), illustrated by thermal noise measurements on AFM cantilevers. They present an excellent long-term stability, and a constant sensitivity independent of the optical phase of the interferometer. A quick review shows that our precision is equaling or out-performing the best results reported in the literature, but for a much larger deflection range, up to a few µm.
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Dates and versions

ensl-00830294 , version 1 (04-06-2013)
ensl-00830294 , version 2 (08-08-2013)



Pierdomenico Paolino, Felipe A. Aguilar Sandoval, Ludovic Bellon. Quadrature phase interferometer for high resolution force spectroscopy. Review of Scientific Instruments, 2013, 84, pp.095001. ⟨10.1063/1.4819743⟩. ⟨ensl-00830294v2⟩
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